High-end Sorter System IL C 3800  for 300 mm Wafers with Class 1 Mini-environment

The IL C 3800 is a multi-functional system for sorting, transfering and inspection of 300 mm wafers. The detailed configuration and extensive accessories results in the IL C 3800 being an exceptionally powerful and multi-faceted solution. The integrated mini-environment (Class 1) is equipped with an ionizer.

The IL C 3800 can be equipped with up to seven load/unload stations that can be loaded manually or automatically in accordance with the SEMI E84 specification. The system uses an Innolas Edge Grip handling system together with a patented Innolas Edge Grip Aligner for automatic high precision orientation of 300 mm wafers.

The IL C 3800 offers the possibility to integrate a Bolts-compatible measurement system. A comprehensive GEM serial communication software is among the numerous options available for IL C 3800 system.

Download: Leaflet IL C 3800 (PDF 431 KB)